Methodical development of a parallel kinematic positioning system based on monolithic structures with flexure hinges

• Methodische Entwicklung eines parallelkinematischen Positioniersystems basierend auf monolithischen Strukturen mit stoffschlüssigen Gelenken

Ivanov, Ivan; Corves, Burkhard (Thesis advisor); Zentner, Lena (Thesis advisor)

1. Auflage. - Aachen : Verlagshaus Mainz GmbH (2016, 2017)
Book, Dissertation / PhD Thesis

Dissertation, RWTH Aachen University, 2016

Abstract

This study deals with the characterization of flexure hinges for the purpose of implementation in high-precision micro manipulators that exhibit a repeatability of the order of 0.1 µm within a working space of the order of 1 mm. In comparison to other joint types, the operation of which also relies upon inherent compliance, monolithic flexure hinges, due to their simplicity and compactness, are extremely beneficial for miniaturized applications in precision engineering. For the reason of complex loading and deformation, under complicated boundary conditions, the behavior of flexure hinges can be hardly described with the help of standard analytical tools in the mechanics of material. Instead, credible mathematical models are set up on the basis of calculations conducted using the finite element method and necessarily verified in test benches. Furthermore, the investigation of the joint specimens by means of scanning electron microscopy proves to be crucial for observing the impact of the fabrication on the material properties and the geometry parameters of flexure hinges, and vice versa. In addition, it is essential for understanding the fatigue process in flexure hinges. Beginning from the findings gathered through the fundamental examination of flexure hinges, a methodical development process is introduced for the building of a spatial positioning system based on monolithic structures with flexure hinges. This study offers a structural concept featuring a very compact construction within a cubic shaped installation space. It brings an optimal dimensioning procedure targeting stiffness maximization. Finally, the positioning system is realized in the form of a functional model that is preliminarily tested reaching an outstanding performance.

Institutions

• Chair and Institute of Mechanism Theory, Machine Dynamics and Robotics [411910]